Title
Characterisation of P floating islands for 150-200 V FLYMOSFETs.
Abstract
A vertical N-channel 150-200 V FLYMOSFET concept has been applied on silicon: its P-buried layer introduced in the N~ epitaxial region, called 'P floating island', is the key factor for superior performance. A particular physical characterisation technique, scanning capacitance microscopy, is used on a power device to establish 2D and 3D island representation and to go beyond ID information given ...
Year
DOI
Venue
2007
10.1049/iet-cds:20060371
IET Circuits, Devices & Systems
Keywords
Field
DocType
power MOSFET
Spreading resistance profiling,Capacitance,Power MOSFET,Scanning capacitance microscopy,Electronic engineering,Breakdown voltage,MOSFET,Mathematics,Silicon,Epitaxy
Journal
Volume
Issue
ISSN
1
5
1751-858X
Citations 
PageRank 
References 
0
0.34
0
Authors
7
Name
Order
Citations
PageRank
Yann Weber112.51
J. Roig2164.23
Jean-Michel Reynes301.35
F. Morancho412.51
Evgueniy N. Stefanov500.34
Monique Dilhan600.34
GÉrard Sarrabayrouse7113.02