Name
Abstract | ||
|---|---|---|
The fabrication and experimental characterization of a thermal flow meter, capable of detecting and measuring two independent gas flows with a single chip, is described. The device is based on a 4 x 4 mm(2) silicon chip, where a series of differential micro-anemometers have been integrated together with standard electronic components by means of post-processing techniques. The innovative aspect of the sensor is the use of a plastic adapter, thermally bonded to the chip, to convey the gas flow only to the areas where the sensors are located. The use of this inexpensive packaging procedure to include different sensing structures in distinct flow channels is demonstrated. |
Year | DOI | Venue |
|---|---|---|
2008 | 10.1109/DTIP.2008.4752992 | DTIP 2008: SYMPOSIUM ON DESIGN, TEST, INTEGRATION AND PACKAGING OF MEMS/MOEMS |
Keywords | DocType | Volume |
sensitivity,electronic components,fluid flow,packaging,anemometers,si,heating,sensors,silicon | Journal | abs/0805.0 |
ISSN | Citations | PageRank |
Dans Symposium on Design, Test, Integration and Packaging of
MEMS/MOEMS - DTIP 2008, Nice : France (2008) | 0 | 0.34 |
References | Authors | |
1 | 3 | |
Name | Order | Citations | PageRank |
|---|---|---|---|
| P. Bruschi | 1 | 8 | 3.42 |
| michele dei | 2 | 0 | 0.34 |
| M. Piotto | 3 | 36 | 8.97 |