Title
Injection Mechanisms and Lifetime Prediction with the Substrate Voltage in 0.15μm Channel-Length N-MOSFETs
Abstract
The effects of the substrate voltage are studied in advanced N-MOSFETs with a 3.2nm gate-oxide thickness used for logic applications. Results show that the electronic gate current originate at low voltage from tunneling contributions and from the first-induced second impact ionization mechanisms. The injection efficiency is found to be channel-length dependent through a large increase in the gate-current with the increase in the lateral field (vertical field) and the electron-electron scattering for low energy hot-carriers. Lifetime prediction techniques are compared showing a strong device lifetime reduction with the back bias at V-SB= V-DD independently of the extrapolating model which can be modeled by the measurement of the gate-current and the emission probability. (C) 2001 Elsevier Science Ltd. All rights reserved.
Year
DOI
Venue
2001
10.1016/S0026-2714(01)00206-2
Microelectronics Reliability
Field
DocType
Volume
Substrate (chemistry),Voltage,Communication channel,Electronic engineering,Engineering,Optoelectronics
Journal
41
Issue
ISSN
Citations 
9
0026-2714
3
PageRank 
References 
Authors
1.19
0
4
Name
Order
Citations
PageRank
A. Bravaix13513.68
D. Goguenheim2106.40
N. Revil33512.25
E. Vincent43716.62