Title
A 2.5D Integrated Voltage Regulator Using Coupled-Magnetic-Core Inductors on Silicon Interposer
Abstract
An integrated voltage regulator (IVR) is presented that uses custom fabricated thin-film magnetic power inductors. The inductors are fabricated on a silicon interposer and integrated with a multi-phase buck converter IC by 2.5D chip stacking. Several inductor design variations have been fabricated and tested. The best performance has been achieved with a set of eight coupled inductors that each occupies 0.245 mm2 and provides 12.5 nH with 270 mΩ DC. With early inductor prototypes, the IVR efficiency for a 1.8 V:1.0 V conversion ratio peaks at 71% with FEOL current density of 10.8 A/mm2 and inductor current density of 1.53 A/mm2. At maximum load current, 69% conversion efficiency and 1.8 V:1.2 V conversion ratio the FEOL current density reaches 22.6 A/mm2 and inductor current density reaches 3.21 A/mm2.
Year
DOI
Venue
2013
10.1109/JSSC.2012.2221237
Solid-State Circuits, IEEE Journal of
Keywords
Field
DocType
elemental semiconductors,magnetic cores,power convertors,power inductors,silicon,voltage regulators,IVR,Si,chip stacking,coupled-magnetic-core inductors,integrated voltage regulator,multi-phase buck converter IC,silicon interposer,thin-film magnetic power inductors,2.5D integration,Buck converter,DC-DC power conversion,Integrated Voltage Regulator (IVR),switched inductor
Current density,Energy conversion efficiency,Computer science,Inductor,Electronic engineering,Magnetic core,Power electronics,Electrical engineering,Buck converter,Voltage regulator,Commutation
Journal
Volume
Issue
ISSN
48
1
0018-9200
Citations 
PageRank 
References 
24
1.48
6
Authors
15