Title
A novel double RESURF LDMOS and a versatile JFET device used as internal power supply and current detector for SPIC
Abstract
In this paper, a novel double RESURF LDMOS with multiple rings in non-uniform drift region is proposed and successfully fabricated. The proposed device maximizes the benefits of the double RESURF technique by optimizes key process and device geometrical parameters in order to achieve the lowest on-resistance with the desired breakdown voltage. In addition, a versatile JFET device is firstly developed. The JFET device cannot only be used as the current detector, but also be used as the internal power supply for SPIC. Besides, it is compatible with Bipolar-CMOS technology, without any additional processes required.
Year
DOI
Venue
2006
10.1016/j.mejo.2005.09.017
Microelectronics Journal
Keywords
Field
DocType
RESURF LDMOS,SPIC,Current detector,JFET,Power supply
JFET,Spic,LDMOS,Electric breakdown,Electronic engineering,Breakdown voltage,Current sensor,Engineering,Electrical engineering,Detector,Lateral diffusion
Journal
Volume
Issue
ISSN
37
7
0026-2692
Citations 
PageRank 
References 
1
0.41
1
Authors
3
Name
Order
Citations
PageRank
Wanjun Chen110.41
Bo Zhang2176.30
Zhaoji Li3237.27