Title
Cycle time simulation study for cluster tool operation in IC fabrication.
Year
DOI
Venue
2011
10.1504/IJMTM.2011.045508
IJMTM
Keywords
Field
DocType
ic fabrication,semiconductor manufacturing,simulation,cycle time
Mean time between failures,Wafer,Semiconductor device fabrication,Wafer fabrication,Simulation modelling,Engineering,Robot,Integrated circuit,Grippers,Operations management
Journal
Volume
Issue
Citations 
23
3/4
0
PageRank 
References 
Authors
0.34
2
3
Name
Order
Citations
PageRank
Amit Kumar Gupta18114.84
Appa Iyer Sivakumar218118.80
Peter Lendermann321925.96