Year | DOI | Venue |
---|---|---|
2011 | 10.1504/IJMTM.2011.045508 | IJMTM |
Keywords | Field | DocType |
ic fabrication,semiconductor manufacturing,simulation,cycle time | Mean time between failures,Wafer,Semiconductor device fabrication,Wafer fabrication,Simulation modelling,Engineering,Robot,Integrated circuit,Grippers,Operations management | Journal |
Volume | Issue | Citations |
23 | 3/4 | 0 |
PageRank | References | Authors |
0.34 | 2 | 3 |
Name | Order | Citations | PageRank |
---|---|---|---|
Amit Kumar Gupta | 1 | 81 | 14.84 |
Appa Iyer Sivakumar | 2 | 181 | 18.80 |
Peter Lendermann | 3 | 219 | 25.96 |