Title
A 90-nm CMOS 1.8-V 2-Gb NAND flash memory for mass storage applications
Abstract
A 1.8-V 2-Gb NAND flash memory has been successfully developed on a 90-nm CMOS STI process technology, resulting in a 141-mm2 die size and a 0.044-μm2 effective cell. For the higher level integration, critical layers are patterned with KrF photolithography. The device has three notable differences from previous generations. 1) The cells are organized in a single (16K+512) column and 128K row array by adopting a one-sided row decoder in order to minimize the die size. 2) The bitline precharge level is set to 0.9 V in order to increase on-cell current. 3) During the program operations, the string select line, which connects the NAND cell strings to the bitlines, is biased with sub-VCC in order to avoid program disturbance issues.
Year
DOI
Venue
2003
10.1109/JSSC.2003.818143
Solid-State Circuits, IEEE Journal of
Keywords
DocType
Volume
CMOS memory circuits,NAND circuits,flash memories,integrated circuit layout,memory architecture,photolithography,1.8 V,2 Gbit,90 nm,CMOS NAND flash memory,CMOS STI process technology,KrF photolithography,NAND cell strings,bitline precharge level,block placement,chip architecture,critical layer patterning,die size minimization,effective cell,higher level integration,mass storage applications,on-cell current,one-sided row decoder,program disturbance avoidance,string select line
Journal
38
Issue
ISSN
Citations 
11
0018-9200
5
PageRank 
References 
Authors
2.31
3
13
Name
Order
Citations
PageRank
June Lee152.31
Sungsoo Lee2216.62
Oh-Suk Kwon3345.38
Kyeong-Han Lee462.73
Dae-Seok Byeon57811.94
Inyoung Kim610116.92
Kyoung-Hwa Lee7194.11
Young-ho852.31
Byung-Soon Choi952.64
Jong Sik Lee107418.95
Wang-Chul Shin1152.31
Jeong-Hyuk Choi12598.17
Kang-Deog Suh135622.19