Title
Potentialities of substrate-thinning technique to control minority carrier injection in smart power IC's
Abstract
This paper deals with the evaluation of a substrate-thinning technique as a way to control the substrate current issues. A test structure has been realized on a Smart Power Technology. Comprehension of the phenomena has been validated thanks to TCAD simulation. This technique was then applied to a commercial IC and the authors show that they succeeded to reduce by one decade the collected current on a victim, although the IC has already been optimized with classical solutions.
Year
DOI
Venue
2006
10.1016/j.mejo.2005.10.016
Microelectronics Journal
Keywords
Field
DocType
Substrate-thinning technique,Substrate current protection,Smart power,TCAD simulation
Smart power technology,Power integrated circuits,Smart power,Computer Aided Design,Circuit design,Electronic engineering,Minority carrier injection,Engineering,Test structure,Electrical engineering
Journal
Volume
Issue
ISSN
37
8
0026-2692
Citations 
PageRank 
References 
0
0.34
1
Authors
5
Name
Order
Citations
PageRank
C. Lochot100.68
J.P. Lainé200.34
M. Bafleur377.06
A. Cazarré400.68
J. Tasselli500.68