Title
Accurate Extraction Of The Trap Depth From Rts Noise Data By Including Poly Depletion Effect And Surface Potential Variation In Mosfets
Abstract
Accurate extraction of the trap position in the oxide in deep-submicron MOSFET by RTN measurement has been investigated both theoretically and experimentally. The conventional equation based on the ratio of emission time and capture time ignores two effects, that is, the poly gate depletion effect and surface potential variation in strong inversion regime. In this paper, by including both of the two effects, we have derived a new equation which gives us more accurate information of the trap depth from the interface and the trap energy. With experimental result, we compare the trap depth obtained from the new equation and that of the conventional method.
Year
DOI
Venue
2007
10.1093/ietele/e90-c.5.968
IEICE TRANSACTIONS ON ELECTRONICS
Keywords
Field
DocType
trap depth, RTN, time constants, poly gate depletion effect, surface potential variation
Oxide,Electronic engineering,Engineering,Miniaturization,MOSFET,Time constant
Journal
Volume
Issue
ISSN
E90C
5
1745-1353
Citations 
PageRank 
References 
2
0.54
0
Authors
4
Name
Order
Citations
PageRank
Ho-chul Lee1144.55
Youngchang Yoon2355.32
Seongjae Cho367.70
Hyungcheol Shin4268.64