Name
Abstract | ||
|---|---|---|
This article addresses reliability of MEMS based systems. It presents the application of the Physics of Failure (PoF) methodology to MEMS and the development of first order behavioral models that may be used for reliability evaluation of MEMS based systems. The development of these models is among others based on a good knowledge and description of environmental influences. Two case studies, combining the use of environmental test and modeling tools, are presented: RF switches that are exposed to temperature variations and irradiation, and an earth sensor that is exposed to temperature variations. (C) 2003 Elsevier Ltd. All rights reserved. |
Year | DOI | Venue |
|---|---|---|
2003 | 10.1016/S0026-2714(03)00332-9 | Microelectronics Reliability |
Field | DocType | Volume |
Microelectromechanical systems,Electronic engineering,Physics of failure,Engineering | Journal | 43 |
Issue | ISSN | Citations |
9 | 0026-2714 | 1 |
PageRank | References | Authors |
0.51 | 0 | 10 |
Name | Order | Citations | PageRank |
|---|---|---|---|
| P. Schmitt | 1 | 1 | 0.51 |
| F. Pressecq | 2 | 6 | 3.32 |
| X. Lafontan | 3 | 6 | 3.30 |
| Q.-H. Duong | 4 | 76 | 7.00 |
| P. Pons | 5 | 49 | 18.02 |
| J.M. Nicot | 6 | 7 | 3.02 |
| Coumar Oudéa | 7 | 3 | 2.59 |
| Daniel Estève | 8 | 258 | 15.76 |
| J-Y. Fourniols | 9 | 11 | 1.55 |
| H. Camon | 10 | 4 | 2.96 |