Title
Novel Tunneling Field-Effect Transistor With Sigma-Shape Embedded Sige Sources And Recessed Channel
Abstract
A novel tunneling field-effect transistor (TFET) featuring the sigma-shape embedded SiGe sources and recessed channel is proposed. The gate facing the source effectively focuses the E-field at the tip of the source and eliminates the gradual turn-on issue of planar TFETs. The fabrication scheme modified from the state-of-the-art 45 nm/32 nm CMOS technology flows provides a unique benefit in the co-integrability and the control of I-D-V-GS characteristics. The feasibility is verified with TCAD process simulation of the device with 14nm of the gate dimension. The device simulation shows 5-order change in the drain current with a gate bias change less than 300 mV.
Year
DOI
Venue
2013
10.1587/transele.E96.C.639
IEICE TRANSACTIONS ON ELECTRONICS
Keywords
Field
DocType
TFET, compatibility to CMOS technology flow, sigma-shape embedded SiGe source, recessed channel
Communication channel,Electronic engineering,Tunneling field effect transistor,Sigma,Engineering
Journal
Volume
Issue
ISSN
E96C
5
1745-1353
Citations 
PageRank 
References 
0
0.34
3
Authors
6
Name
Order
Citations
PageRank
Min-Chul Sun101.69
Sang Wan Kim202.37
Garam Kim301.35
Hyun Woo Kim46312.99
Hyungjin Kim522114.63
Byung-Gook Park6714.38