Name
Abstract | ||
|---|---|---|
Pick-place of single nanowires inside scanning electron microscopes (SEM) is useful for prototyping functional devices and characterizing nanowires' properties. Nanowire pick-place has been typically performed via teleoperation, which is time-consuming and highly skill-dependent. This paper presents a robotic system capable of automated pick-place of single nanowires. Through SEM visual detection and vision-based motion control, the system transferred individual silicon nanowires from their growth substrate to a micro-electromechanical systems (MEMS) device that characterized the nanowires' electromechanical properties. The performance of the nanorobotic pick-up and placement procedures was quantified by experiments. The system demonstrated automated nanowire pick-up and placement with high reliability. |
Year | DOI | Venue |
|---|---|---|
2012 | 10.1109/ICRA.2012.6225187 | 2012 IEEE INTERNATIONAL CONFERENCE ON ROBOTICS AND AUTOMATION (ICRA) |
Keywords | DocType | Volume |
motion control,scanning electron microscopes,teleoperation,nanowires,edge detection,sem,visualization,scanning electron microscope,scanning electron microscopy | Conference | 2012 |
Issue | ISSN | Citations |
1 | 1050-4729 | 2 |
PageRank | References | Authors |
0.45 | 4 | 3 |
Name | Order | Citations | PageRank |
|---|---|---|---|
| Xutao Ye | 1 | 3 | 1.16 |
| Yong Zhang | 2 | 63 | 9.90 |
| Yu Sun | 3 | 418 | 69.89 |