Paper Info
Title
Design And Implementation Of A Rfid Based Real-Time Location-Aware System In Clean Room
Abstract
Application of Automated Material Handling System (AMHS) to the semiconductor manufacturing factories is one of the most important steps in the automation process of semiconductor business. All cassettes in the vehicle of the transportation facility can send their positioning information through this system. Nevertheless, some positioning information may still be interfered or get lost if there is any relocation of the cassette inside the effective ranges of AMHS by operators. In order to retrieve these lost cassettes only manpower is possible, and the relocation process is time wasting and inefficient. In this paper, we have implemented a Clean Room Real-Time Location-aware System (CRRLS) that is based on the technology of RFID (Radio Frequency Identification). The proposed system can reveal the positioning information of the cassette in the clean room by analyzing the received radio frequency energy information. Moreover, we establish a transmitting model of radio signal, and used this model to estimate distance between RFID tag and readers. A triangular positioning algorithm is developed to estimate the location and its 2-dimensional coordinate of the cassette. Furthermore, reusable RFID tags can save additional information sent by the transceivers and data of parameters for the production process to reduce the possibility of severe damage because of wrong parameters setting. As a result, competitive advantage of the semiconductor business can herewith greatly increase.
Year
DOI
Venue
2009
10.1109/ISPA.2009.84
2009 IEEE INTERNATIONAL SYMPOSIUM ON PARALLEL AND DISTRIBUTED PROCESSING WITH APPLICATIONS, PROCEEDINGS
Keywords
Field
DocType
semiconductor manufacture, automated material handling system (AMHS), RFID, infrared, LANDMARC
Mobile computing,Transceiver,Computer science,Competitive advantage,Semiconductor device fabrication,Scheduling (production processes),Radio frequency,Automation,Real-time computing,Radio-frequency identification
Conference
Citations 
PageRank 
References 
8
0.60
4
Authors
4
Name
Order
Citations
PageRank
Kun-Ming Yu125827.07
Ming-Gong Lee2293.68
Chien-Tung Liao380.60
Hung-Jui Lin480.60