Paper Info
Title
Actively Servoed Multi-Axis Microforce Sensors
Abstract
This paper presents design, fabrication, and calibration results of MEMS-based two-axis capacitive force sensors capable of resolving forces up to 490muN with a resolution of 0.01muN in x, and up to 900muN with a resolution of 0.241muN in y in the passive mode. Electrostatic microactuators are integrated to enable the force sensors to operate in an actively servoed mode, in which system stiffness is modulated using force compensation, greatly increasing force measurement dynamic ranges. When the microforce sensor is actively servoed, an externally applied force is balanced by the electrostatic forces generated by the electrostatic microactuators within the sensor. The movable parts of the sensor are maintained in the equilibrium position, making the system a regulator system. The force measurement is obtained by interpreting the actuation voltages. Probes of different shapes are integrated with the sensors for micromanipulation. Other types of end-effectors, such as microgrippers and microneedles for different micromanipulation tasks can be integrated by modifying the fabrication sequence. The current application of the force sensors is for providing real-time force feedback during microrobotic cell manipulation.
Year
DOI
Venue
2003
10.1109/ROBOT.2003.1241611
2003 IEEE INTERNATIONAL CONFERENCE ON ROBOTICS AND AUTOMATION, VOLS 1-3, PROCEEDINGS
Keywords
Field
DocType
capacitive sensors,end effectors,force sensor,calibration,real time,biotechnology,dynamic range,electrostatic force,force feedback
Mechanical equilibrium,Microelectromechanical systems,Stiffness,Voltage,Control engineering,Robot end effector,Capacitive sensing,Engineering,Grippers,Haptic technology
Conference
ISSN
Citations 
PageRank 
1050-4729
1
0.38
References 
Authors
0
5
Name
Order
Citations
PageRank
Yu Sun141869.89
David P. Potasek221.38
D. Piyabongkarn3448.17
Rajesh Rajamani445888.34
Bradley J. Nelson51263202.74