Name
Abstract | ||
|---|---|---|
This paper presents a high-bandwidth capacitance estimation and driving circuit especially tailored for its use with MEMS electrostatic actuators. The circuit can be integrated as a part of a system comprising an electrostatic actuator to provide self-testing and failure prediction capabilities and also as a simple and low-cost actuator dynamics characterization system capable of measuring both periodic and non-periodic movements. |
Year | DOI | Venue |
|---|---|---|
2011 | 10.1016/j.microrel.2010.09.027 | Microelectronics Reliability |
Field | DocType | Volume |
Capacitance,Microelectromechanical systems,Electronic engineering,Driving circuit,Engineering,Self test,Periodic graph (geometry),Dynamical system,Actuator,Estimator | Journal | 51 |
Issue | ISSN | Citations |
3 | 0026-2714 | 1 |
PageRank | References | Authors |
0.40 | 2 | 3 |
Name | Order | Citations | PageRank |
|---|---|---|---|
| Daniel Fernández | 1 | 27 | 6.82 |
| Jordi Madrenas | 2 | 150 | 27.87 |
| Jordi Cosp | 3 | 36 | 6.25 |