Title
BEOL variability and impact on RC extraction
Abstract
Historically, Back End of Line (BEOL) or interconnect resistance and capacitance have been viewed as parasitic components. They have now become key parameters with significant impact on circuit performance and signal integrity. This paper examines the types of BEOL variations and their impact on RC extraction. The importance of modeling systematic effects in RC extraction is discussed. The need for minimizing the computational error in RC extraction before incorporating random process variations is emphasized.
Year
DOI
Venue
2005
10.1145/1065579.1065778
DAC
Keywords
Field
DocType
hardware,signal integrity,process variation,parasitic capacitance,rc circuits,interconnect,extraction,crosstalk,copper,etching,random process
Parasitic capacitance,Capacitance,Computer science,Signal integrity,Back end of line,Electronic engineering,RC circuit,Process variation,Circuit performance,Interconnection
Conference
ISSN
ISBN
Citations 
0738-100X
1-59593-058-2
7
PageRank 
References 
Authors
0.60
2
7
Name
Order
Citations
PageRank
N. S. Nagaraj18617.37
Tom Bonifield2192.97
Abha Singh3192.97
Clive Bittlestone4223.77
Usha Narasimha5355.81
Viet Le6162.25
Anthony M. Hill7356.58