Paper Info
Title
High precision positioning control for SPM based nanomanipulation: A robust adaptive model reference control approach
Abstract
Scanning probe microscope (SPM) based nanomanipulations have been successfully applied to various fields to explore and study the unique structures and properties in the nano world. SPM has the ability to manipulate nanoparticles and modify a sample surface in nano scale. Therefore, the positioning accuracy of the SPM probe is the crucial for nanomanipulations. In general, the precision of SPM based nanomanipulations has been limited mainly by hysteresis, creep and drift of the piezo actuator. In this research, a new control strategy named hysteresis creep inverse based robust adaptive model reference control (RAMRC) is proposed to reduce the hysteresis, creep and system drift of the SPM scanner for improving the positioning accuracy of nanomanipulations. The RAMRC approach uses a compensator to compensate the hysteresis and creep. In addition, to tackle the unknown drift, the RAMRC also has a robust adaptive controller to explicitly deals with the noise and disturbance. This is suitable for manipulating nano-objects in a noisy environment, which is difficult for fixed operators/parameters based compensators and controllers. Additionally, the numerical experimental results support the RAMRC theory well and the position error can be controlled within approximate ten nanometers based on simulation results.
Year
DOI
Venue
2014
10.1109/AIM.2014.6878322
AIM
Keywords
Field
DocType
creep,micromanipulators,model reference adaptive control systems,nanoparticles,piezoelectric actuators,position control,robust control,scanning probe microscopy,ramrc approach,spm based nanomanipulation,spm probe,spm scanner,fixed operator-parameter based compensators,high precision positioning control,hysteresis creep inverse based robust adaptive model reference control,nano-object manipulation,nanoparticle manipulation,nanoscale,piezo actuator,sample surface,scanning probe microscope,system drift,mathematical model,robustness,control systems,hysteresis,accuracy
Computer science,Control theory,Control engineering
Conference
ISSN
Citations 
PageRank 
2159-6255
1
0.35
References 
Authors
3
5
Name
Order
Citations
PageRank
Bo Song1103.76
Zhiyong Sun222.06
Ning Xi31422228.89
Ruiguo Yang4165.97
Liangliang Chen5187.52