Title
Wafer-scale transducer arrays
Abstract
The production of wafer-scale transducer arrays using laser interconnection techniques and micromatching technology is discussed. The design of a wafer-scale thermal dynamic scene simulator that was implemented using the laser-linking redundancy technique is presented to illustrate typical design requirements. The simulator uses small arrays of thermal pixels and control circuitry in 3 mu m CMOS technology.<>
Year
DOI
Venue
1992
10.1109/2.129048
IEEE Computer
Keywords
DocType
Volume
CMOS integrated circuits,VLSI,image sensors,infrared detectors,micromechanical devices,transducers,3 micron,CMOS technology,laser interconnection techniques,micromatching technology,redundancy technique,thermal dynamic scene simulator,thermal pixels,wafer-scale transducer arrays
Journal
25
Issue
ISSN
Citations 
4
0018-9162
3
PageRank 
References 
Authors
0.65
1
3
Name
Order
Citations
PageRank
Glenn H. Chapman116734.10
Parameswaran, M.230.65
Marek Syrzycki3174.60