Title
On-chip testing of embedded silicon transducers
Abstract
System-on-chip (SoC) technologies are evolving towards the integration of highly heterogeneous devices, including hardware of a different nature, such as digital, analog and mixed-signal, together with software components. Embedding transducers, as predicted by technology roadmaps, is yet another step in this continuous search for higher levels of integration and miniaturisation. Embedded transducers fabricated with silicon/CMOS compatible technologies may have more limitations than transducers fabricated with fully dedicated technologies. However, they offer industry the possibility of providing low cost applications for very large market niches, while still keeping acceptable transducer sensitivity. This is the case, for example, for accelerometers, micro-mirrors display devices or CMOS imagers. Embedded transducers are analog components. However, given the fact that they work with signals other than electrical, the test of these embedded parts poses new challenges. Test technology for SoC devices is rapidly maturing but many difficulties still remain, in particular for addressing the test of analog and mixed-signal parts. In this paper, we present our work in the field of MEMS (micro-electro-mechanical systems) on-chip testing with a brief overview of the state-of-the-art.
Year
DOI
Venue
2004
10.1109/ICM.2004.1434190
SoCC
Keywords
Field
DocType
analog components,mems on-chip testing,transducers,integrated circuit testing,cmos compatible technology,micromechanical devices,fault simulation,micromirrors display devices,failure mechanisms,a-hdl,mems,system-on-chip,built-in self test,electronics industry,failure analysis,silicon compatible technology,built-in self-test,silicon,mixed analogue-digital integrated circuits,on-chip testing,integrated circuit design,embedded silicon transducers,microelectromechanical systems,fault modelling,si,mixed signal test,accelerometers,elemental semiconductors,analog signal test,cmos imagers,soc technology,system-on-chip technology,mixed-signal components,system on chip,chip,fault model,indexing terms,software component
Transducer,System on a chip,Microelectromechanical systems,Computer science,Display device,CMOS,Electronic engineering,Integrated circuit design,Electronics,Component-based software engineering,Electrical engineering
Conference
ISSN
ISBN
Citations 
2164-1676
0-7803-8656-6
1
PageRank 
References 
Authors
0.36
4
4
Name
Order
Citations
PageRank
Salvador Mir142656.22
B. Charlot2204.73
L. Rufer3356.75
Bernard Courtois4132.54