Name
Title | ||
|---|---|---|
Performances and potentialities of a very simple self-compensated pressure sensor demonstrator |
Abstract | ||
|---|---|---|
A pressure sensor demonstrator has been designed and mounted using a simple analog-digital BiCMOS converter and a capacitive silicon-Pyrex sensing cell. The measurements as a function of pressure and temperature have enabled the authors to evaluate the efficiency of a ratiometric scheme to self-compensate thermal drifts and nonlinearities. The best demonstrator is characterized by a thermal coefficient of offset smaller than 20 ppm/K and a nonlinearity lower than or equal to ±1.2% FS. The essential features of the sensor have been modeled by a simple analytical expression. The model specifies the potential gains in pressure sensitivity and nonlinearity. The best design is based on a quasisymmetrical architecture in which stray capacitors are minimized. This study demonstrates the feasibility of self-compensated capacitive sensors characterized by an overall accuracy of the order of a few percent of the measurement scale over a temperature range of 100 K at very low cost |
Year | DOI | Venue |
|---|---|---|
1999 | 10.1109/19.816126 | IEEE T. Instrumentation and Measurement |
Keywords | Field | DocType |
capacitive sensors,indexing terms,capacitors,pressure sensor,capacitive sensor,pressure measurement,si,pressure sensors | BiCMOS,Thermal,Nonlinear system,Capacitor,Atmospheric temperature range,Capacitive sensing,Control engineering,Electronic engineering,Pressure sensor,Mathematics,Offset (computer science) | Journal |
Volume | Issue | ISSN |
48 | 6 | 0018-9456 |
Citations | PageRank | References |
0 | 0.34 | 0 |
Authors | ||
6 | ||
Name | Order | Citations | PageRank |
|---|---|---|---|
| Philippe Ménini | 1 | 8 | 2.96 |
| G. Blasquez | 2 | 0 | 0.68 |
| P. Pons | 3 | 49 | 18.02 |
| X. Chauffleur | 4 | 13 | 3.11 |
| P. Dondon | 5 | 0 | 0.68 |
| C. Zardini | 6 | 0 | 0.34 |