Name
Abstract | ||
|---|---|---|
As very large scale integration (VLSI) technology advances to smaller and smaller nodes, certain layout configurations tend to have reduced yield and/or reliability during manufacturing processes because of increased susceptibility to stress effects or poor tolerance to certain processes like lithography. Such layout configurations are called process-hotspots, which are represented here accurately and compactly by range patterns. The concept of a range pattern is introduced to represent a set of similar patterns compactly. Since low-yielding patterns are directly represented, it can supplement the deficiencies of available modelling and/or subsequent correction (for instance, mask synthesis) techniques. A scoring mechanism can be provided for each range pattern to score the problem regions covered by the range pattern according to their yield impact. A library of range patterns for representing the process-hotspots is being developed in collaboration with a semiconductor manufacturing company. A fast and accurate process-hotspot detection system based on the range pattern matching algorithm is implemented, which can find all occurrences of the process-hotspots represented as range patterns in a given industrial layout. Experimental results are quite promising and show that all the locations that match each range pattern (i.e. process-hotspots) in a given layout can be found in several minutes. |
Year | DOI | Venue |
|---|---|---|
2008 | 10.1049/iet-cds:20070190 | Iet Circuits Devices & Systems |
Keywords | Field | DocType |
VLSI,lithography,pattern matching,lithography,process-hotspot detection,range pattern matching,semiconductor manufacturing,very large scale integration technology | String searching algorithm,Hot spot (veterinary medicine),Semiconductor device fabrication,Electronic engineering,Lithography,Integrated circuit,Very-large-scale integration,Hotspot (Wi-Fi),Pattern matching,Mathematics | Journal |
Volume | Issue | ISSN |
2 | 1 | 1751-858X |
Citations | PageRank | References |
11 | 1.07 | 3 |
Authors | ||
6 | ||
Name | Order | Citations | PageRank |
|---|---|---|---|
| Hailong Yao | 1 | 267 | 39.56 |
| Subarna Sinha | 2 | 198 | 20.80 |
| Jeffrey Xu Yu | 3 | 7018 | 464.96 |
| C. Chiang | 4 | 94 | 11.05 |
| Yici Cai | 5 | 1135 | 120.11 |
| X. Hong | 6 | 11 | 1.07 |