Paper Info
Title
Modeling and compensation of asymmetric hysteresis in a piezo actuated metrological AFM
Abstract
The manipulation of samples in atomic force microscopes (AFMs) is often performed using piezoelectric actuators. In this paper, a metrological AFM with a 3 degree-of-freedom (DOF) stage driven by piezo-stack actuators is considered. The piezo actuators exhibit hysteresis, which can change the system dynamics and/or acts as a non-linear disturbance on the system. This deteriorates the performance of the AFM. The 3 DOF stage exhibits asymmetric hysteresis, which is modeled by extending the Coleman-Hodgdon model. The asymmetry includes a scan range dependent offset and an asymmetry between the trace and retrace directions. Non-linear multi-variable optimization is employed to derive the optimal generic model for all scan ranges. The proposed extended Coleman-Hodgdon model describes the asymmetric hysteresis over all scan ranges with an accuracy of 97%. Based on the model, a feedforward compensation method is developed. Experiments on the metrological AFM show that the application of the hysteresis feedforward largely improves the scanning accuracy.
Year
DOI
Venue
2009
10.1109/ACC.2009.5160007
ACC'09 Proceedings of the 2009 conference on American Control Conference
Keywords
DocType
ISSN
atomic force microscopy,feedforward,optimisation,piezoelectric actuators,coleman-hodgdon model,asymmetric hysteresis,atomic force microscopes,feedforward compensation method,nonlinear disturbance,nonlinear multivariable optimization,optimal generic model,piezo-stack actuators,piezoactuated metrological afm,degree of freedom,system dynamics,atomic force microscope
Conference
0743-1619 E-ISBN : 978-1-4244-4524-0
ISBN
Citations 
PageRank 
978-1-4244-4524-0
1
0.36
References 
Authors
4
6
Name
Order
Citations
PageRank
Roel J. E. Merry151.22
mustafa uyanik210.36
René van de Molengraft319423.48
Maarten Steinbuch465896.53
Koops, K.R.521.05
manfred l j van veghel610.36