Title
Modeling of a planar motion stage for precision positioning
Abstract
In this contribution we develop a physical model for a non contact, high-precision Lorentz force planar motion stage of linear DC brushless type. We derive physical models of the relevant components and investigate sources and influences of various parasitic effects and disturbances. For the latter, phenomenological models are developed that capture the behavior observed throughout experiments. The position dependency of the Lorentz forces is reduced by a minimum power commutation. Finally, model characteristics and parameters are identified from experimental test rig data.
Year
DOI
Venue
2013
10.1109/MMAR.2013.6669880
Methods and Models in Automation and Robotics
Keywords
Field
DocType
actuators,brushless DC motors,linear motors,motion control,position control,high-precision Lorentz force planar motion stage model,linear DC brushless type motor,minimum power commutation,parasitic disturbances,parasitic effects,phenomenological models,position dependency,precision positioning
Physical model,Test rig,Motion control,Control theory,Computer science,Control engineering,Planar,Linear motor,Actuator,Commutation,Lorentz force
Conference
ISBN
Citations 
PageRank 
978-1-4673-5506-3
0
0.34
References 
Authors
2
4
Name
Order
Citations
PageRank
Treichel, K.100.68
Remon Al Azrak200.34
Johann Reger34017.29
Wulff, K.400.34