Name
Abstract | ||
|---|---|---|
Piezo-actuated stages have become more and more promising in nanopositioning applications due to the excellent advantages of the fast response time, large mechanical force, and extremely fine resolution. Modeling and control are critical to achieve objectives for high-precision motion. However, piezo-actuated stages themselves suffer from the inherent drawbacks produced by the inherent creep and h... |
Year | DOI | Venue |
|---|---|---|
2016 | 10.1109/TASE.2014.2352364 | IEEE Transactions on Automation Science and Engineering |
Keywords | Field | DocType |
Creep,Hysteresis,Piezoelectric actuators,Mathematical model,Nanopositioning,Vibrations,Integrated circuit modeling | Piezoelectric actuators,Fine resolution,Computer science,Creep,Response time,Hysteresis,Control engineering,Vibration | Journal |
Volume | Issue | ISSN |
13 | 1 | 1545-5955 |
Citations | PageRank | References |
28 | 1.87 | 51 |
Authors | ||
5 | ||
Name | Order | Citations | PageRank |
|---|---|---|---|
| Guo-Ying Gu | 1 | 112 | 18.13 |
| Limin Zhu | 2 | 180 | 35.43 |
| Chun-Yi Su | 3 | 2681 | 209.14 |
| Han Ding | 4 | 499 | 78.16 |
| Sergej Fatikow | 5 | 143 | 32.84 |