Title
Wide band study of silicon-on-insulator photodiodes on suspended micro-hotplates platforms
Abstract
In this paper, the performances of a lateral thin-film PIN photodiode based on silicon-on-insulator technology are reported for applications from blue to red wavelengths. The platform consists of a micro-hotplate with a suspended heater and a photodiode. Responsivities of 0.01 to 0.05 A/W were obtained for 450-900 nm light range in reverse bias operation. Suspended photodiodes give up to 5x responsivity improvement with regard to the photodiodes on substrate. In addition to photodetection, the diode can monitor the temperature with a linear voltage decreasing by about 1.4 mV/K, under 50 μA constant forward current for a large range of temperature (measured from 25 to 300°C).
Year
DOI
Venue
2015
10.1109/ICICDT.2015.7165879
2015 International Conference on IC Design & Technology (ICICDT)
Keywords
Field
DocType
Semiconductor photodiode,Lateral thin-film PIN diode,Temperature sensor,Silicon-on-Insulator,Harsh environment,CMOS technologies
Silicon on insulator,Responsivity,Diode,Voltage,Electronic engineering,Engineering,Photodetection,Optoelectronics,Temperature measurement,Silicon,Photodiode
Conference
ISSN
Citations 
PageRank 
2381-3555
1
0.63
References 
Authors
0
9
Name
Order
Citations
PageRank
nicolas andre110.63
guoliang li210.63
p gerard310.63
Olivier Poncelet441.10
yaping zeng510.63
s z ali610.63
F. Udrea766.19
Laurent A. Francis853.67
Denis Flandre931670.47