Title
Optimization of a MOS–IGBT–SCR ESD protection component in smart power SOI technology
Abstract
A MOS–IGBT–SCR component that was proposed in a previous paper to increase the device robustness and the cost of ESD protection circuit is optimized in this paper. In order to improve its latch-up immunity, several variations of geometrical parameters that have been simulated using TCAD Sentaurus Device in another previous paper have been implemented and compared in this work. The drift area, the form factor, and the proportion of P+ sections inserted into the drain are the main parameters, which have a significant impact on the latch-up immunity. TLP characterization, and curve tracer measurements have been carried out to evaluate the proposed solution. Holding current increases up to 70mA and holding voltage up to 10V.
Year
DOI
Venue
2015
10.1016/j.microrel.2015.06.138
Microelectronics Reliability
Keywords
Field
DocType
ESD,Latchup,MOS,IGBT,SCR,Holding current,Holding voltage,Robustness
Silicon on insulator,LDMOS,Electrostatic discharge,Voltage,Electronic engineering,Insulated-gate bipolar transistor,Engineering,Miniaturization,High voltage,Electrical engineering,Integrated circuit
Journal
Volume
Issue
ISSN
55
9
0026-2714
Citations 
PageRank 
References 
0
0.34
1
Authors
4
Name
Order
Citations
PageRank
Houssam Arbess101.35
M. Bafleur277.06
David Trémouilles3138.69
Moustafa Zerarka411.45