Title
Optimization On Layout Strategy Of Gate-Grounded Nmos For On-Chip Esd Protection In A 65-Nm Cmos Process
Abstract
Layout strategies including source edge to substrate space (SESS) and inserted substrate-pick stripes of gate-grounded NMOS (ggNMOS) are optimized in this work for on-chip electrostatic discharge (ESD) protection. In order to fully investigate influences of substrate resistors on triggering and conduction behaviors of ggNMOS, various devices are designed and fabricated in a 65-nm CMOS process. Direct current (DC), transmission-line-pulsing (TLP), human body model (HBM) and very-fast TLP (VF-TLP) tests are executed to fully characterize performance of fabricated ggNMOS. Test results reveal that an enlarged SESS parameter results in an earlier triggering behavior of ggNMOS, which presents a layout option for subtle adjustable triggering behaviors. Besides, inserted substrate-pick stripes are proved to have a bell-shape influence on the ESD robustness of ggNMOS and this bell-shape influence is valid in TLP, HBM and VF-TLP tests. Moreover, the most ESD-robust ggNMOS optimized under different inserted substrate-pick stripes always achieves a higher HBM level over the traditional ggNMOS at each concerned total device-width. Physical mechanisms of test results will be deeply discussed in this work.
Year
DOI
Venue
2016
10.1587/transele.E99.C.590
IEICE TRANSACTIONS ON ELECTRONICS
Keywords
Field
DocType
electrostatic discharge (ESD), gate-grounded NMOS (ggNMOS), substrate-pickup stripes, transmission-line-pulsing (TLP) test
NMOS logic,Electronic engineering,Cmos process,Engineering,Electrical engineering
Journal
Volume
Issue
ISSN
E99C
5
1745-1353
Citations 
PageRank 
References 
1
0.40
3
Authors
3
Name
Order
Citations
PageRank
Guangyi Lu185.15
Yuan Wang21713.39
zhang3109.77