Name
Title | ||
|---|---|---|
Schedulability Analysis for Noncyclic Operation of Time-Constrained Cluster Tools With Time Variation. |
Abstract | ||
|---|---|---|
We consider a scheduling problem of a robotized cluster tool for semiconductor manufacturing, which should control wafer delays within a chamber so as not to exceed a specified limit under time variation. The prior research has proposed a p+-time event graph, an extension of Petri nets, for modeling the scheduling problem and developed a method of verifying whether a cyclic p+-time event graph or ... |
Year | DOI | Venue |
|---|---|---|
2016 | 10.1109/TASE.2016.2531105 | IEEE Transactions on Automation Science and Engineering |
Keywords | Field | DocType |
Time factors,Delays,Robots,Job shop scheduling,Schedules,Manufacturing,Petri nets | Event graph,Mathematical optimization,Petri net,Job shop scheduling,Not-To-Exceed,Computer science,Parallel computing,Semiconductor device fabrication,Schedule,Robot,Security token,Distributed computing | Journal |
Volume | Issue | ISSN |
13 | 3 | 1545-5955 |
Citations | PageRank | References |
2 | 0.37 | 14 |
Authors | ||
3 | ||
Name | Order | Citations | PageRank |
|---|---|---|---|
| Hyun Jung Kim | 1 | 17 | 5.33 |
| Jun-Ho Lee | 2 | 224 | 21.56 |
| Tae-Eog Lee | 3 | 285 | 30.02 |