Name
Title | ||
|---|---|---|
Translation-Invariant Multiscale Energy-Based PCA for Monitoring Batch Processes in Semiconductor Manufacturing. |
Abstract | ||
|---|---|---|
The overwhelming majority of processes taking place in semiconductor manufacturing operate in a batch mode by imposing time-varying conditions to the products in a cyclic and repetitive fashion. These conditions make process monitoring a very challenging task, especially in massive production plants. Among the state-of-the-art approaches proposed to deal with this problem, the so-called multiway m... |
Year | DOI | Venue |
|---|---|---|
2017 | 10.1109/TASE.2016.2545744 | IEEE Transactions on Automation Science and Engineering |
Keywords | Field | DocType |
Monitoring,Batch production systems,Principal component analysis,Process control,Trajectory | Fault detection and isolation,Computer science,Root cause analysis,Semiconductor device fabrication,Control engineering,Batch processing,Process control,Overfitting,Rendering (computer graphics),Principal component analysis | Journal |
Volume | Issue | ISSN |
14 | 2 | 1545-5955 |
Citations | PageRank | References |
3 | 0.43 | 5 |
Authors | ||
4 | ||
Name | Order | Citations | PageRank |
|---|---|---|---|
| Tiago J. Rato | 1 | 4 | 1.81 |
| Jakey Blue | 2 | 14 | 5.15 |
| Jacques Pinaton | 3 | 19 | 12.98 |
| Marco S. Reis | 4 | 13 | 6.49 |