Paper Info
Title
Efficient Spatial Variation Characterization via Matrix Completion.
Abstract
In this paper, we propose a novel method to estimate and characterize spatial variations on dies or wafers. This new technique exploits recent developments in matrix completion, enabling estimation of spatial variation across wafers or dies with a small number of randomly picked sampling points while still achieving fairly high accuracy. This new approach can be easily generalized, including for estimation of mixed spatial and structure or device type information.
Year
Venue
Field
2017
arXiv: Computational Engineering, Finance, and Science
Small number,Mathematical optimization,Matrix completion,Algorithm,Die (manufacturing),Sampling (statistics),Spatial variability,Mathematics
DocType
Volume
Citations 
Journal
abs/1703.09876
0
PageRank 
References 
Authors
0.34
2
3
Name
Order
Citations
PageRank
Hongge Chen101.69
Duane Boning220149.37
Zheng Zhang38731.73