Name
Title | ||
|---|---|---|
Laser Scanning Confocal Thermoreflectance Microscope for the Backside Thermal Imaging of Microelectronic Devices. |
Abstract | ||
|---|---|---|
In this paper, we report on a confocal thermoreflectance imaging system that can examine the thermal characteristics of microelectronic devices by penetrating the backside of a device through the substrate. In this system, the local reflectivity variations due to heat generation in the device are measured point by point by a laser scanning confocal microscope capable of eliminating out-of-focus reflections and the thermoreflectance is extracted via Fourier-domain signal processing. In comparison to the conventional widefield thermoreflectance microscope, the proposed laser scanning confocal thermoreflectance microscope improves the thermoreflectance sensitivity by similar to 23 times and the spatial resolution by similar to 25% in backside thermoreflectance measurements. |
Year | DOI | Venue |
|---|---|---|
2017 | 10.3390/s17122774 | SENSORS |
Keywords | Field | DocType |
thermal imaging,reflection,confocal microscopy | Analytical chemistry,Thermal,Laser scanning,Microelectronics,Microscope,Engineering,Confocal,Reflectivity,Image resolution,Optoelectronics,Confocal microscopy | Journal |
Volume | Issue | ISSN |
17 | 12.0 | 1424-8220 |
Citations | PageRank | References |
0 | 0.34 | 2 |
Authors | ||
8 | ||
Name | Order | Citations | PageRank |
|---|---|---|---|
| Dong Uk Kim | 1 | 0 | 0.68 |
| Chan Bae Jeong | 2 | 0 | 0.68 |
| Jung Dae Kim | 3 | 0 | 0.68 |
| Kye-Sung Lee | 4 | 1 | 2.17 |
| Hwan Hur | 5 | 1 | 1.16 |
| Ki-Hwan Nam | 6 | 2 | 1.78 |
| Geon Hee Kim | 7 | 0 | 0.34 |
| Ki Soo Chang | 8 | 1 | 1.50 |