Name
Title | ||
|---|---|---|
A simulation-based approach for an effective AMHS design in a legacy semiconductor manufacturing facility |
Abstract | ||
|---|---|---|
This paper addresses the design of an Automated Material Handling System (AMHS) for wafer lots in the photolithography workshop of a 200mm wafer manufacturing facility (fab) that was not initially built to have such a system. Lots transportation has to be performed using an Overhead Hoist Transport (OHT) system that was already chosen to transport reticles in the workshop. The main objective is to propose a decision support tool to characterize the AMHS elements including lot handling, transportation as well as the storage space design. A simulation-based approach is proposed to evaluate different scenarios and propose an effective AMHS design. Experimental results based on real instances confirm the capability of the proposed AMHS design to support the workshop activity.
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Year | DOI | Venue |
|---|---|---|
2017 | 10.5555/3242181.3242494 | WSC '17: Winter Simulation Conference
Las Vegas
Nevada
December, 2017 |
Field | DocType | ISSN |
Wafer,Systems engineering,Factory,Computer science,Decision support system,Semiconductor device fabrication,Photolithography,Hoist (device),Robot,Reticle | Conference | 0891-7736 |
ISBN | Citations | PageRank |
978-1-5386-3427-1 | 0 | 0.34 |
References | Authors | |
2 | 4 | |
Name | Order | Citations | PageRank |
|---|---|---|---|
| Ali Ben-Salem | 1 | 0 | 0.34 |
| Claude Yugma | 2 | 7 | 2.77 |
| Emmanuel Troncet | 3 | 0 | 0.34 |
| Jacques Pinaton | 4 | 19 | 12.98 |