Name
Abstract | ||
|---|---|---|
This paper focuses on the optimization of a fixed-topology MEMS accelerometer sensor using the MOEA/D evolutionary algorithm. Several methodologies have been implemented for the optimization of MEMS sensors. These techniques are either based on sweeping several design parameters to achieve a good performance or focused on the sensitivity analysis to determine the effects of each design parameter in order to find an optimal point. All of these techniques lead to some high performance device designs; however, with the integration of the sensor models into the MOEA/D optimization algorithm, optimal design points can be achieved by using multi-objective optimization. In this work, highly accurate sensor models have been integrated into the optimization loop in order to obtain optimal Pareto Fronts of a MEMS Accelerometer topology. Both of the sensor models and the optimization algorithm has been implemented using Matlab. The results are compared with a commercial design with the same topology and an improvement of 29% of noise performance for a similar sensor area, or an improvement of 25% sensor area for a similar noise performance has been achieved. |
Year | DOI | Venue |
|---|---|---|
2017 | 10.1109/SMACD.2017.7981574 | 2017 14th International Conference on Synthesis, Modeling, Analysis and Simulation Methods and Applications to Circuit Design (SMACD) |
Keywords | Field | DocType |
MEMS accelerometer optimization,multiobjective evolutionary algorithm,fixed-topology MEMS accelerometer sensor,MOEA-D evolutionary algorithm,design parameters,sensitivity analysis,sensor model integration,optimal design points,multiobjective optimization,sensor model,Matlab,noise performance | MATLAB,Evolutionary algorithm,Microelectromechanical systems,Accelerometer,Control engineering,Optimal design,Electronic engineering,Optimization algorithm,Topology optimization,Engineering,Pareto principle | Conference |
ISSN | ISBN | Citations |
2575-4874 | 978-1-5090-5053-6 | 0 |
PageRank | References | Authors |
0.34 | 2 | 3 |
Name | Order | Citations | PageRank |
|---|---|---|---|
| Murat Pak | 1 | 15 | 2.64 |
| Francisco V. Fernández | 2 | 234 | 40.82 |
| Günhan Dündar | 3 | 245 | 37.59 |