Title
Application and Product-Volume-Specific Customization of BEOL Metal Pitch.
Abstract
High-volume manufacturing of integrated circuits is what drives the semiconductor industry and the scaling of CMOS; however, shrinking all feature sizes is not optimal for all product volumes and applications. While scaling transistors provide improvement in performance at power in general, concerted scaling of the back-end-of-line (BEOL) interconnects provides improvement in density but at some e...
Year
DOI
Venue
2018
10.1109/TVLSI.2018.2828387
IEEE Transactions on Very Large Scale Integration (VLSI) Systems
Keywords
Field
DocType
Wires,Capacitance,Couplings,Metals,Silicon,Integrated circuit interconnections,Routing
Capacitance,Computer science,Signal integrity,Chip,CMOS,Electronic engineering,Transistor,Scaling,Integrated circuit,Design for manufacturability
Journal
Volume
Issue
ISSN
26
9
1063-8210
Citations 
PageRank 
References 
0
0.34
0
Authors
4
Name
Order
Citations
PageRank
Samuel N. Pagliarini1144.96
Mehmet Meric Isgenc232.41
Mayler G. A. Martins38810.08
Lawrence T. Pileggi492.71