Title
Impact of carbon impurities on the initial leakage current of AlGaN/GaN high electron mobility transistors.
Abstract
We have systematically studied the origin of high gate-leakage currents in AlGaN/GaN high electron mobility transistors (HEMTs). Devices that initially had a low gate-leakage current (good devices) are compared with ones that had a high gate-leakage current (bad devices). The apparent zero-bias Schottky barrier height of bad devices (0.4 < ϕB0 < 0.62 eV) was found to be lower than that of the good devices (ϕB0 = 0.79 eV). From transmission electron microscopy (TEM) and electron energy loss spectroscopy (EELS) analysis, we found that this difference is due to the presence of carbon impurities in the nickel layer in the gate region.
Year
DOI
Venue
2018
10.1016/j.microrel.2018.06.048
Microelectronics Reliability
Keywords
Field
DocType
AlGaN/GaN HEMTs,Leakage current,Carbon impurities,TEM,EELS,Schottky barrier height
Schottky barrier,Impurity,Leakage (electronics),Transmission electron microscopy,Electronic engineering,Nickel,Engineering,Transistor,Electron energy loss spectroscopy,Optoelectronics,Electron mobility
Journal
Volume
ISSN
Citations 
88
0026-2714
0
PageRank 
References 
Authors
0.34
3
4
Name
Order
Citations
PageRank
Sasangka, W.A.132.25
Yu Gao26115.12
Chee Lip Gan34210.12
Thompson, Carl V.45011.56