Name
Title | ||
|---|---|---|
Self-tuning of dEWMA controller parameters for mixed product processes with equipment aging |
Abstract | ||
|---|---|---|
This paper presents an iterative approach which provides a sub-optimal solution of the best achievement performance in the case of closed-loop aged-based processes applied on semiconductor manufacturing industry. The aim is to provide an online parameter estimation of dEWMA Controller in the case of mixed product Run-to-Run (RtR) control. The online estimation is done without any a priori knowledge of process parameters and noise structure. The best achievement performance improvements is illustrated using a simulation problem from literature. The example is applied on the removal rate control in a Chemical Mechanical Polishing (CMP) process. |
Year | DOI | Venue |
|---|---|---|
2016 | 10.1109/MED.2016.7535903 | 2016 24th Mediterranean Conference on Control and Automation (MED) |
Keywords | Field | DocType |
dEWMA controller parameter self-tuning,equipment aging,iterative approach,suboptimal solution,closed-loop aged-based process,semiconductor manufacturing industry,online parameter estimation,mixed product run-to-run control,mixed product RtR control,performance improvement,simulation problem,removal rate control,chemical mechanical polishing process,CMP process,double-exponentially weighted moving average controller | Control theory,Control theory,Computer science,A priori and a posteriori,Semiconductor device fabrication,Control engineering,Self-tuning,Estimation theory,Chemical-mechanical planarization | Conference |
ISSN | ISBN | Citations |
2325-369X | 978-1-4673-8347-9 | 0 |
PageRank | References | Authors |
0.34 | 3 | 4 |
Name | Order | Citations | PageRank |
|---|---|---|---|
| Graton, G. | 1 | 2 | 3.13 |
| El Mostafa El Adel | 2 | 6 | 2.28 |
| Mustapha Ouladsine | 3 | 45 | 14.69 |
| Jacques Pinaton | 4 | 19 | 12.98 |