Name
Abstract | ||
|---|---|---|
We report on the manufacturing of nanopore through-holes by heating gold nanoparticles on a silicon oxide (SiO
<sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</sub>
) sheet, suspended in a silicon-rich nitride membrane (SiRN). Membrane patterning is performed using self-alignment by an internal shadow mask based process. A benefit of this approach is the ease at which downscaling of the lithographic features can be achieved. With a single alignment, a shadow mask is etched and metal is deposited. The nanopore through hole is then created after heating. In this paper this scalable technique is applied to create non-buckled membranes by combining the compressive and tensile stress components in a SiO
<sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</sub>
/SiRN bilayer. Theory on the bilayer stresses is given in order to characterize the buckling. The nanopore through holes are characterized using ionic current measurements and electron microscopy techniques. |
Year | DOI | Venue |
|---|---|---|
2016 | 10.1109/NEMS.2016.7758204 | 2016 IEEE 11th Annual International Conference on Nano/Micro Engineered and Molecular Systems (NEMS) |
Keywords | DocType | ISSN |
solid-state nanopore formation,gold nanoparticles,silicon oxide,silicon rich nitride,shadow mask | Conference | 2474-3747 |
ISBN | Citations | PageRank |
978-1-5090-1948-9 | 0 | 0.34 |
References | Authors | |
0 | 7 | |
Name | Order | Citations | PageRank |
|---|---|---|---|
| L.J. de Vreede | 1 | 0 | 0.34 |
| J. W. Berenschot | 2 | 1 | 0.96 |
| Niels Roelof Tas | 3 | 0 | 0.34 |
| W.T.E. van den Beld | 4 | 0 | 0.34 |
| J.T. Loessberg-Zahl | 5 | 0 | 0.34 |
| A. van den Berg | 6 | 0 | 0.34 |
| Jan C.T. Eijkel | 7 | 0 | 0.34 |