Paper Info
Title
An effective on-line surface particles inspection instrument for large aperture optical element
Abstract
Surface particles growing in large aperture optical element (LAOE) have significant impact on LAOE’s stable operation. It is a challenge for the online system to inspect the particles with long working distance, enough precision and high efficiency because of the system constraints. In this paper, an effective and portable inspection instrument is designed based on dark-field imaging principle. A Nikon lens and an industrial high definition (HD) camera are selected to construct the vision system to inspect particles of microns size spreading over hundreds of millimeters. Using two motors and other mechanical structure, the system can realize auto-focus and image rectification functions. The line light sources are installed on both sides of the LAOE in a sealed box while the vision system is portable and working outside the box. An adaptive binarization method is proposed to process the captured dark-field image. The distribution of particles on the LAOE’s surface is investigated. Because of the high resolution of the captured image, the SSE2 instructions optimization method is used to reduce the time cost of the algorithm. Experiments show that the instrument can inspect LAOE effectively and accurately.
Year
DOI
Venue
2017
10.1007/s11633-017-1079-6
International Journal of Automation and Computing
Keywords
DocType
Volume
Dark-field imaging,image rectification,adaptive binarization,particle inspection,large aperture optical elements (LAOE)
Journal
14
Issue
ISSN
Citations 
4
1751-8520
1
PageRank 
References 
Authors
0.35
5
8
Name
Order
Citations
PageRank
Wen-Dong Ding110.35
Zheng-Tao Zhang2578.00
Dapeng Zhang3254.00
De Xu414225.04
Hai-Bing Lv510.35
Xin-Xiang Miao610.35
Guorui Zhou71367.94
Hao Liu821259.74