Paper Info
Title
A Bayesian indicator for Run-to-Run Performance Assessment using Industrail Risk.
Abstract
This paper proposes a performance indicator based on the Bayesian theory. This indicator is used for assessing the performances of Run-to-Run controllers. The indicator is calculated by analyzing four main points: the output/target error, the output dispersion, the out of tolerance (oot) rate and the industrial risk. The proposed Bayesian method has been tested on the Run-to-Run loops of a semiconductor manufacturing foundry.
Year
DOI
Venue
2018
10.1109/WSC.2018.8632503
WSC '18: Winter Simulation Conference Gothenburg Sweden December, 2018
Field
DocType
ISSN
Performance indicator,Computer science,Simulation,Semiconductor device fabrication,Process control,Reliability engineering,Bayesian probability
Conference
0891-7736
ISBN
Citations 
PageRank 
978-1-5386-6570
0
0.34
References 
Authors
0
5
Name
Order
Citations
PageRank
Taki Eddine Korabi100.34
Graton, G.223.13
El Mostafa El Adel362.28
Mustapha Ouladsine44514.69
Jacques Pinaton51912.98