Abstract | ||
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Industrial alarm system management and enhancement have recently become a subject of high interest in the industrial domain as well as in the scientific research area. Alarm system performance is the key point to look at for the examination of whether they work correctly. Few research papers so far have focused on the semiconductor manufacturing process area. This paper summarizes some interesting work applied not long ago in other industries and especially those adapted to semiconductor manufacturing. It represents a concise description of semiconductor manufacturing processes, toward an understanding of the problems and challenges encountered. Furthermore, a basic statistical analysis employed to show some of alarm system performance metrics that have used, as shown in some well-known standards, to assess an alarm system performance as well as highlighting misconfigured alarms based on their recorded histories. |
Year | DOI | Venue |
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2019 | 10.1109/CoDIT.2019.8820351 | 2019 6TH INTERNATIONAL CONFERENCE ON CONTROL, DECISION AND INFORMATION TECHNOLOGIES (CODIT 2019) |
Keywords | Field | DocType |
Alarm system, Alarms types, Nuisance alarms, Chattering alarms, Repeating alarms, Standing and Stale alarms, Automated Material Handling Systems, Alarms logs, Performance assessment, Semiconductor manufacturing | Systems engineering,ALARM,Computer science,Semiconductor device fabrication,Systems management,Scientific method,Statistical analysis | Conference |
ISSN | Citations | PageRank |
2576-3555 | 0 | 0.34 |
References | Authors | |
0 | 5 |
Name | Order | Citations | PageRank |
---|---|---|---|
Mohammed Al-Kharaz | 1 | 0 | 0.34 |
Bouchra Ananou | 2 | 0 | 0.34 |
Mustapha Ouladsine | 3 | 45 | 14.69 |
Michel Combal | 4 | 0 | 0.34 |
Jacques Pinaton | 5 | 19 | 12.98 |