Title
Backside Thermal Fault Localization Using Laser Scanning Confocal Thermoreflectance Microscopy Based on Auto-Balanced Detection
Abstract
In this paper, we propose a sensitivity-enhanced thermoreflectance microscopy (TRM) system employing an electronic auto-balancing photoreceiver for effective thermal fault localization through a Si substrate. The proposed system in the auto-balanced detection not only improves the system signal-to-noise ratio (SNR) by approximately five times compared to that achievable via normal detection but al...
Year
DOI
Venue
2020
10.1109/TIM.2019.2925248
IEEE Transactions on Instrumentation and Measurement
Keywords
DocType
Volume
Laser beams,Circuit faults,Measurement by laser beam,Substrates,Imaging,Silicon,Transmission line measurements
Journal
69
Issue
ISSN
Citations 
6
0018-9456
0
PageRank 
References 
Authors
0.34
0
10
Name
Order
Citations
PageRank
Dong-Uk Kim192.31
Jung Dae Kim200.68
Ilkyu Han300.34
Chan Bae Jeong400.68
Kye-Sung Lee512.17
Hwan Hur611.16
Ki-Hwan Nam721.78
Ji Yong Bae800.34
I Jong Kim900.34
Ki Soo Chang1011.50