Name
Title | ||
|---|---|---|
High-Scalability CMOS Quantum Magnetometer With Spin-State Excitation and Detection of Diamond Color Centers |
Abstract | ||
|---|---|---|
Magnetometers based on quantum mechanical processes enable high sensitivity and long-term stability without the need for re-calibration, but their integration into fieldable devices remains challenging. This article presents a CMOS quantum vector-field magnetometer that miniaturizes the conventional quantum sensing platforms using nitrogen-vacancy (NV) centers in diamond. By integrating key components for spin control and readout, the chip performs magnetometry through optically detected magnetic resonance (ODMR) through a diamond slab attached to a custom CMOS chip. The ODMR control is highly uniform across the NV centers in the diamond, which is enabled by a CMOS-generated ~2.87 GHz magnetic field with <; 5% inhomogeneity across a large-area current-driven wire array. The magnetometer chip is 1.5 mm
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in size, prototyped in 65-nm bulk CMOS technology, and attached to a 300 × 80 μ m
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diamond slab. NV fluorescence is measured by CMOS-integrated photodetectors. This ON-chip measurement is enabled by efficient rejection of the green pump light from the red fluorescence through a CMOS-integrated spectral filter based on a combination of spectrally dependent plasmonic losses and diffractive filtering in the CMOS back-end-of-line (BEOL). This filter achieves a measured ~25 dB of green light rejection. We measure a sensitivity of 245 nT/Hz
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, marking a 130 × improvement over a previous CMOS-NV sensor prototype, largely thanks to the better spectral filtering and homogeneous microwave generation over larger area. |
Year | DOI | Venue |
|---|---|---|
2021 | 10.1109/JSSC.2020.3027056 | IEEE Journal of Solid-State Circuits |
Keywords | DocType | Volume |
CMOS,field homogeneity,magnetometry,nanophotonic filter,nitrogen-vacancy (NV) centers,quantum,Zeeman | Journal | 56 |
Issue | ISSN | Citations |
3 | 0018-9200 | 2 |
PageRank | References | Authors |
0.72 | 0 | 4 |
Name | Order | Citations | PageRank |
|---|---|---|---|
| Mohamed Ibrahim | 1 | 59 | 4.86 |
| Foy Christopher | 2 | 2 | 0.72 |
| Dirk R. Englund | 3 | 3 | 1.41 |
| Ruonan Han | 4 | 152 | 27.20 |