Name
Abstract | ||
|---|---|---|
•A new R2R control framework based on Dynamic Bayesian Network is proposed.•Physic-informed DBN is constructed based on equipment sensor data and prior knowledge.•A causal structure enables analyzing the underlying process interactions.•Validation results with the real data confirm the usefulness of the proposed model. |
Year | DOI | Venue |
|---|---|---|
2020 | 10.1016/j.eswa.2020.113424 | Expert Systems with Applications |
Keywords | DocType | Volume |
Advanced Process Control (APC),Chemical-Mechanical Polishing (CMP),Dynamic Bayesian Network (DBN),Fault Detection and Classification (FDC),Physics-informed,Run-to-Run (R2R) control | Journal | 155 |
ISSN | Citations | PageRank |
0957-4174 | 0 | 0.34 |
References | Authors | |
0 | 5 | |
Name | Order | Citations | PageRank |
|---|---|---|---|
| Wei-Ting Yang | 1 | 1 | 1.02 |
| Jakey Blue | 2 | 14 | 5.15 |
| Agnes Roussy | 3 | 1 | 0.69 |
| Jacques Pinaton | 4 | 19 | 12.98 |
| Marco S. Reis | 5 | 13 | 6.49 |