Name
Abstract | ||
|---|---|---|
Lorentz-force Microelectromechanical Systems (MEMS) magnetometers have been proposed to replace magnetometers in current consumer electronics products. As a result, there exist numerous works that propose MEMS transducers and readout systems. However, when it comes to the characterization of MEMS devices, a wide variety of strategies and instruments are used, making it difficult to compare results from different works. In this article, a test setup for the characterization of Lorentz-force MEMS magnetometers is proposed. The solution in based in the use of an impedance analyser along with a simple and flexible circuit that provides the in-phase driving of the voltage and the current of the MEMS. The proposed solution has been successfully used to characterize MEMS magnetometers with very different characteristics. |
Year | DOI | Venue |
|---|---|---|
2020 | 10.1109/ICECS49266.2020.9294898 | 2020 27th IEEE International Conference on Electronics, Circuits and Systems (ICECS) |
Keywords | DocType | ISBN |
MEMS,Magnetic Sensor,Magnetometer,Device Characterization,Test Setup,MEMS Measurement | Conference | 978-1-7281-6045-0 |
Citations | PageRank | References |
0 | 0.34 | 2 |
Authors | ||
3 | ||
Name | Order | Citations | PageRank |
|---|---|---|---|
| Josep Maria Sánchez-Chiva | 1 | 0 | 0.34 |
| Daniel Fernández | 2 | 0 | 0.34 |
| Jordi Madrenas | 3 | 150 | 27.87 |