Title
Efficient Manufacturing of Microdome Array for Advanced Electronic and Optical Devices†
Abstract
Aiming at improving the precision and decreasing roughness of micro-manufacturing, this work proposes a new method that combines non-uniform graphic compensation for template preparation and demolding with viscous fluid composed of mixtures of two types of polydimethylsiloxane (PDMS), Sylgard 184 and SE 1700. Notably, this method can widely apply to a bounty of micro-manufacturing methods, such as...
Year
DOI
Venue
2021
10.1109/NEMS51815.2021.9451498
2021 IEEE 16th International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)
Keywords
DocType
ISSN
Pressure sensors,Graphics,Fluids,Sensitivity,Three-dimensional printing,Optical sensors,Optical reflection
Conference
2474-3747
ISBN
Citations 
PageRank 
978-1-6654-1941-3
0
0.34
References 
Authors
0
8
Name
Order
Citations
PageRank
Zehua Xiang100.34
Haobin Wang200.34
Hang Guo300.34
Ji Wan400.34
Chen Xu529612.94
Liming Miao600.34
mengdi han701.69
Haixia Alice Zhang82413.99