Design of a novel low cross-axis sensitivity micro-gravity sandwich capacitance accelerometer | 0 | 0.34 | 2011 |
Design and fabrication of a mems capacitive accelerometer based on double-device-layers SOI wafer | 0 | 0.34 | 2010 |
Fabrication of complicated three dimensional structures utilizing multi-stack bonding | 0 | 0.34 | 2009 |