Author Info
Name
Affiliation
Papers
FANG YANG
Peking Univ, Inst Microelect, Natl Key Lab Sci & Technol Micro Nano Fabricat, Beijing 100871, Peoples R China
5
Collaborators
Citations 
PageRank 
18
0
1.69
Referers 
Referees 
References 
0
6
2
Title
Citations
PageRank
Year
Discussion and analysis of Au/a-Si contact resistance in MEMS/NEMS devices00.342015
Investigation of stress rupture properties of micro beams using the piezoresistive effect00.342015
Parylene C autofluorescence for on-chip highest processing temperature sensing00.342015
Mechanical strength measurement of micro anchor-beam combined structure fabricated by silicon-on-glass process00.342014
Study on compatible CMOS-MEMS process with surface micromachining for the application of monolithic integration00.342014