Author Info
Name
Affiliation
Papers
LI ZHANG
Peking Univ, Inst Microelect, Natl Key Lab Sci & Technol Micro Nano Fabricat, Beijing, Peoples R China
3
Collaborators
Citations 
PageRank 
11
0
1.01
Referers 
Referees 
References 
0
0
0
Title
Citations
PageRank
Year
Discussion and analysis of Au/a-Si contact resistance in MEMS/NEMS devices00.342015
Investigation of stress rupture properties of micro beams using the piezoresistive effect00.342015
Study on compatible CMOS-MEMS process with surface micromachining for the application of monolithic integration00.342014