Name
Title | ||
|---|---|---|
Simulation Analysis on the Impact of Furnace Batch Size Increase in a Deposition Loop |
Abstract | ||
|---|---|---|
In the dynamic environment of semiconductor manufacturing operations, a bottleneck could be created at the bake furnaces of the deposition loop as capacity expands. Upgrading of the bake furnaces by adding a lot-per-batch in the boat or purchasing a new furnace are two possible solutions to this problem. A simulation model was constructed to assist the decision making, with the behavior of the wet benches (upstream tools) and cluster tools (downstream tools) being modeled in detail. We concluded that a limited number of furnaces upgrade is sufficient to sustain the capacity expansion. But the bottleneck was shifted to an upstream tool, which required the backup tool to be activated to manage the queue. A loading policy that constrains batches to queue at maximum time before loading into the furnaces has to be implemented to balance the efficiency at the furnaces and their downstream tools, without compromising on the cycle time |
Year | DOI | Venue |
|---|---|---|
2006 | 10.1109/WSC.2006.322961 | Winter Simulation Conference |
Keywords | Field | DocType |
coating techniques,furnace batch size,cluster tools,furnaces,discrete event simulation,integrated circuit manufacture,deposition loop,simulation analysis,furnace batch size increase,cluster tool,integrated circuit metallisation,wet benches,bake furnace,furnaces upgrade,loading policy,bake furnaces,semiconductor manufacturing operations,capacity expansion,cycle time,backup tool,downstream tool,upstream tool,maximum time,simulation model,semiconductor manufacturing | Bottleneck,Computer science,Simulation,Queue,Semiconductor device fabrication,Upgrade,Size increase,Purchasing,Backup,Discrete event simulation | Conference |
ISBN | Citations | PageRank |
1-4244-0501-7 | 4 | 0.52 |
References | Authors | |
4 | 6 | |
Name | Order | Citations | PageRank |
|---|---|---|---|
| Boon Ping Gan | 1 | 329 | 34.25 |
| Peter Lendermann | 2 | 219 | 25.96 |
| Kelvin Paht Te Quek | 3 | 4 | 0.52 |
| Bart van der Heijden | 4 | 4 | 0.52 |
| Chen Chong Chin | 5 | 4 | 0.52 |
| Choon Yap Koh | 6 | 4 | 0.52 |