Title
Fabrication Of Inp/Ingaas Dhbts With Buried Sio2 Wires
Abstract
In this paper, we report the fabrication and device characteristics of InP/InGaAs double heterojunction bipolar transistors (DHBTs) with buried SiO2 wires. The SiO2 wires were buried in the collector and subcollector layers by metalorganic chemical vapor deposition toward reduction of the base-collector capacitance under the base electrode. A current gain of 22 was obtained at an emitter current density of 1.25 MA/cm(2) for a DHBT with an emitter width of 400 nm. The DC characteristics of DHBTs with buried SiO2 wires were the same as those of DHBTs without buried SiO2 wires on the same substrate. A current gain cutoff frequency (f(T)) of 213 GHz and a maximum oscillation frequency (f(max)) of 100 GHz were obtained at an emitter current density of 725 kA/cm(2).
Year
DOI
Venue
2011
10.1587/transele.E94.C.830
IEICE TRANSACTIONS ON ELECTRONICS
Keywords
DocType
Volume
heterojunction bipolar transistor, InP, MOCVD, CBr4
Journal
E94C
Issue
ISSN
Citations 
5
0916-8524
0
PageRank 
References 
Authors
0.34
0
5
Name
Order
Citations
PageRank
Naoaki Takebe100.68
Takashi Kobayashi210.96
H. Suzuki323831.31
Yasuyuki Miyamoto414.68
Kazuhito Furuya511.30